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High-precision silicon carbide guide rails are used for nanoscale motion platforms
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High-precision silicon carbide guide rails are used for nanoscale motion platforms

The application of silicon carbide ceramic guide rails are:

silicon carbide ceramic guide rail, is one of the core components of semiconductor lithography machine, applied to: Silicon carbide ceramic air flotation motion platform, silicon carbide ultra-precision moving platform, silicon carbide guide rail, silicon carbide slide rail, silicon carbide vacuum suction cup, silicon carbide reflector, silicon carbide crossbeam, silicon carbide workpiece table, etc. the main function is to carry the wafer to perform high-speed ultra-precision motion along the designated movement trajectory and complete a series of exposure required actions. this includes loading and unloading, alignment, wafer profile measurement and exposure, etc. It is required to achieve nanometer-level motion accuracy under high-speed movement conditions.

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    The application of silicon carbide ceramic guide rails are:

    silicon carbide ceramic guide rail, is one of the core components of semiconductor lithography machine, applied to: Silicon carbide ceramic air flotation motion platform, silicon carbide ultra-precision moving platform, silicon carbide guide rail, silicon carbide slide rail, silicon carbide vacuum suction cup, silicon carbide reflector, silicon carbide crossbeam, silicon carbide workpiece table, etc. the main function is to carry the wafer to perform high-speed ultra-precision motion along the designated movement trajectory and complete a series of exposure required actions. this includes loading and unloading, alignment, wafer profile measurement and exposure, etc. It is required to achieve nanometer-level motion accuracy under high-speed movement conditions.

    Product features:

    Product features:

    silicon carbide ceramics not only has excellent mechanical properties at room temperature, such as high flexural strength, excellent oxidation resistance, good corrosion resistance, high wear resistance and low friction coefficient, and high temperature mechanical properties (strength, creep resistance, etc.) is a well known ceramic material. Silicon carbide has the characteristics of corrosion resistance, high-temperature resistance, high strength, good thermal conductivity and impact resistance.

     

    1. High strength

    2. High temperature resistant

    3. Strong corrosion resistance

    4. High Oxidation resistance

    5. Good thermal shock resistance

    6. High thermal conductivity



    Fountyl advantages

    1,Japanese technology, independent research and development and production of silicon carbide ceramic materials;

    2,The longest size: 1600 mm

    3,Structure customization: lightweight structure, weight loss can design structure,

    4,High precision: high precision, according to different structure and different size, please confirm accuracy with the customer.

    5,Can choose the material: aluminum oxide, silicon carbide ceramic