Industry News
Electrostatic Chuck (ESC) Guide
Discover how electrostatic chucks work, their key applications in semiconductor manufacturing, advantages, and future trends in this ultimate guide.
Electrostatic Chuck: Enabling High Precision in Semiconductor Wafer Handling
Explore electrostatic chucks for high-precision semiconductor wafer handling, covering principles, applications, and industry benefits
What are fine ceramics? high-end materials in CMF
Ceramics are inorganic non-metallic materials, generally divided into traditional ceramics (for daily use) and fine ceramics, etc. The fine ceramics (also known as advanced ceramics, new ceramics, industrial ceramics, etc.) introduced in this article are commonly used in the CMF field. Compared with traditional ceramics, there are significant differences in raw material preparation, molding and post-processing techniques between the two. Therefore, their application fields are also quite different, and they are widely used in consumer electronics such as mobile phones and smart wearables, etc.
Introduction to Ceramic Parts in Semiconductor Components
Ceramic materials, as an important type of composite material system, typically consist of a mixed system composed of various compounds such as alumina (Al₂O₃), silicon nitride (Si₃N₄), and zirconia (ZrO₂). Through strict formula design and component regulation, precise control of material performance parameters can be achieved.
Black porous alumina ceramics: The light-absorbing material of semiconductor vacuum ceramic chuck
Porous alumina ceramics are a type of ceramic material with alumina as the matrix, which is sintered at high temperatures and contains a large number of micro-pores or porous structures that are interconnected and also communicate with the surface. The pore structure and specific chemical composition inside porous ceramics directly affect their morphology and properties, and the most important factor influencing the pore structure is the preparation process and method.
Electrostatic chuck, HEFLOW
Electrostatic Chuck(ESC) play a significant role in modern high-tech manufacturing processes, especially when dealing with precision objects such as silicon wafers. They firmly fix the workpiece through electrostatic force, avoiding the use of traditional mechanical fixtures or vacuum suction, and simplifying the manufacturing process.
Detailed introduction of five major types of semiconductor ceramic parts
Semiconductor device is composed of inside and outside the cavity, Most ceramics are used in chambers closer to the wafer. The important ceramic components widely used in the core equipment cavity are semiconductor equipment parts made from advanced ceramic materials such as alumina ceramics, aluminum nitride ceramics, and silicon carbide ceramics through precise processing.
Core ceramic components inside the etching machine
According to their working principles, the most common classifications of etching are dry etching and wet etching. The difference between the two lies in whether solvents or solutions are used for etching. Among them, the market share of dry etching exceeds 95%.
Plastic sealing adhesive accelerator - DuPont ™ Cyclotene™
When manufacturing semiconductor devices or packaging, the bonding between the materials used is one of the most important considerations. Usually, multiple layers of polymers, metals and inorganic glass are used, and these layers must adhere well to each other to pass the reliability test. Therefore, the adhesion of advanced electronic resins derived from B-stage dibenzocyclobutene (BCB) monomers to various materials is crucial for manufacturing reliable equipment.
Wafer chuck
ESC uses electrostatic force to firmly fix the wafer or substrate in the vacuum environment of the processing equipment. This method eliminates the potential damage associated with traditional mechanical clamping methods, which may scratch fine surfaces or induce stress fractures.