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Pure beryllium oxide (BeO) belongs to the cubic crystal system with a density of 3.03 g/cm³ and a melting point of 2570℃. It has very high thermal conductivity, thermal conductivity is almost equivalent to copper, pure aluminum, thermal conductivity λ in the range of 200-250 W/(m · K), and has good thermal shock resistance

Aluminum nitride ceramic is a kind of high temperature structural ceramic material with excellent performance, which has excellent comprehensive properties such as high temperature resistance, high strength, high hardness and corrosion resistance. However, in the sintering process of aluminum nitride ceramics, the crystal phase conversion phenomenon is easy to occur, which will lead to the reduction of its strength.

Give priority to improving the molding/sintering process for mass production; Small batches of high-precision parts can focus on CMP/ laser dressing. Through multi-dimensional collaborative optimization, precision ceramic surface roughness Ra≤0.05μm can be achieved to meet the needs of high-end applications.

Internationally, especially in the United States, Japan, Western Europe and other developed countries due to its modern industrial and high-tech industries developed, nearly two decades for the performance of the new generation of ceramics demand continues to increase, maintain an annual growth rate of nearly 5-8%, producing a number of international has a high reputation of advanced ceramics enterprises

Advanced ceramics as an important structural/functional integration material, its unique performance is irreplaceable, in aerospace, new energy vehicles, semiconductors, high-end equipment and other emerging strategic industries and national defense industry has a huge application prospects, has an indispensable role, the application of key products is developing rapidly.

Due to the excellent performance of Al2O3 ceramics, the application field is more and more broad, and it plays an important value in the machinery, chemical, metallurgy, electronics, energy, environmental protection, aerospace, semiconductor and new energy vehicles and other industries.

The traditional concept of ceramics refers to all artificial industrial products based on inorganic non-metallic minerals such as clay. It includes all kinds of articles made from clay or mixtures containing clay by mixing, forming, and calcining.

Wafer clamp a variety of manufacturing processes such as lithography, etching, deposition, testing and bonding in a variety of equipment. During these processes, the chuck must maintain precise control of the wafer position, orientation, and temperature. It is also critical to ensure minimal particle contamination, as any particle contamination can lead to defects and reduced production.