Ceramic robotic arms for wafer handling in the semiconductor field

I. Introduction to Semiconductor Processing

Semiconductor products require extremely clean conditions and must be free from contamination. During the production of semiconductor products, strict environmental requirements are imposed, and the production process is usually carried out in highly controlled dust-free workshops. The production personnel must wear anti-static clothing. 

Semiconductor products are very delicate items. Some products have extremely thin thicknesses, only a few millimeters or even thinner. Therefore, they need to be handled with care. During processing and various treatments, there are very high requirements for all clamping tools, clamping fixtures, and containers that come into contact with semiconductor parts. The main requirement is to avoid contaminating the semiconductor parts, and at the same time, these workholding fixtures and tools must be able to withstand various acid, alkali, and heat treatments, ensuring durability.

Ceramic mechanical arm

II. Introduction to Ceramic Mechanical Arms for Semiconductor Applications

Mechanical Arm Materials: Generally, 99% alumina ceramic or silicon carbide ceramic is selected.

Silicon carbide ceramic belongs to structural ceramics. Its hardness is only second to diamond, and its wear resistance far exceeds steel and chromium steel. Silicon carbide ceramic has the characteristics of high temperature resistance, wear resistance, corrosion resistance, low friction coefficient, and light weight. The maximum operating temperature can reach 1600℃, and it is suitable for the semiconductor industry.

The origin of the name of the ceramic mechanical arm: The alumina ceramic mechanical arm is also known as alumina ceramic tooth fork or wafer transfer end effector. It is a part made of alumina ceramic and is installed on the wafer handling robot, acting as the robot's hand, responsible for transporting wafer silicon wafers to the designated position. Its surface directly contacts the wafer. The alumina ceramic mechanical arm is lightweight, which can effectively reduce the equipment load and increase the equipment service life.

Types of Ceramic Mechanical Arms: There are clamping type, bearing type, vacuum suction type, and Bernoulli type ceramic mechanical arms.

Processing Flow of Ceramic Mechanical Arms: After spraying high-purity alumina powder, the formed granules are dried and pressed to form a core body. The core body is then cold isostatic pressed and removed from the container. High temperature is used to remove the voids between the particles inside the body, making the granular ceramic body densified and forming a solid. A rotary grinding wheel is used to perform planar processing and grinding on the ceramic body to remove the oxide layer and impurities on the surface. The surface of the ceramic part is further ground by the internal and external circle processing method. The ceramic parts are precisely processed using a CNC numerical control machine to ensure the accuracy and surface roughness of the ceramic parts.

Ceramic mechanical arm

III. Compared with metal arms, the advantages of using ceramic arms for clamping semiconductor parts are as follows:

1. Ceramic mechanical arms are more resistant to acid corrosion and alkali corrosion than metal arms. During various processing of semiconductors, their service life is longer; 

2. Ceramic mechanical arms do not react with other substances, do not leave small particles with pollution and electric charges on the contacted items, do not produce metal ions, and do not contaminate semiconductor parts; 

3. During the thermal treatment of semiconductors, ceramic mechanical arms deform less under heat, reducing the deformation of semiconductor parts during thermal treatment; 

Ceramic mechanical arm

The application of ceramic materials can not only be made into mechanical arms for grasping and clamping semiconductor parts. Based on the characteristics of ceramic insulation, high temperature resistance, no fear of acid and alkali, stable performance, and the non-polluting contact product feature, it can be made into other parts that can be used in harsh environments, and can be made in places that metal and plastic cannot handle.

FOUNTYL TECHNOLOGIES PTE LTD, established in January 2023, it is a technology-based enterprise specializing in the research and development, production and sales of precision ceramic materials. Provide customers with high-precision and high-quality precision ceramic parts. We offer new ceramic materials including alumina, zirconia, aluminum nitride and silicon nitride, and are involved in advanced manufacturing technologies such as ceramic forming, sintering, mechanical processing and precision grinding. We take it as our responsibility to provide customers with high-quality products and excellent services, and are committed to becoming the most influential provider of precision ceramic parts in Southeast Asia.

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