Electrostatic chuck, HEFLOW
Electrostatic Chuck(ESC) plays a significant role in modern high-tech manufacturing processes, especially when dealing with precision objects such as silicon wafers. They firmly fix the workpiece through electrostatic force, avoiding the use of traditional mechanical fixtures or vacuum suction, and simplifying the manufacturing process. Unlike vacuum chuck, electrostatic chuck do not rely on pressure differences, thus enabling better control and flexibility in wafer processing. Electrostatic chucks are widely used in processes such as plasma etching, chemical vapor deposition (CVD), and ion implantation in semiconductor manufacturing.
In current etching equipment, ESC is generally used as the lower electrode. ESC is the static electricity that holds the wafer in place while keeping it at a constant temperature. The early traditional way to fix wafers was to mechanically press the periphery of the wafer to secure it to the electrode. However, this method had two obvious drawbacks: ① The center of the wafer was not closely attached to the electrode; ②The part of the wafer that is pressed by the mechanical fixture cannot be etched.
The ESC principle and the adsorption principle
In terms of structure, ESC can be classified into two types: monopolar and bipolar. The principle of ESC can be summarized as the Coulomb force between positive and negative charges acting between the wafer and the electrode, causing the wafer to adhere to the electrode.
Based on the difference in conductivity of materials, ESC can be divided into two types: Coulomb force type ESC and Johnson-Rahbek type ESC. In the Coulomb force type ESC, an insulator (commonly alumina ceramic or polyimide material) is placed between the wafer and the ESC, and there is no movement of charges. When a high voltage of 3000V is applied to the ESC electrode, opposite charges are excited on the back of the wafer, and the wafer is adsorbed by the Coulomb force between these charges. Since there is no charge movement in the Coulomb force type ESC, the response of Chuck/Dechuck is excellent. However, due to the small adsorption force, a high voltage is required for adsorption.
In the Johnson-Rahbek type ESC, a material with a certain degree of conductivity is inserted between the wafer and the ESC. When a voltage is applied to the ESC electrode, charges move in the ceramic and concentrate near the surface, bringing the positive and negative charges closer together, which results in a strong adsorption force.
The principle of wafer temperature control
The temperature control of the wafer is indirectly achieved through thermal contact between the temperature-controlled ESC and the back of the wafer. The coolant circulates to keep the ESC fixed at the corresponding temperature. Since the heat transfer from the ESC to the wafer is not sufficient merely through physical contact, currently, He flow is punched between the wafer and the ESC to assist in heat conduction. Because He is lighter than air and other etching gases, its molecular movement rate is fast, shuttling back and forth between the wafer and ESC to transfer heat energy. Moreover, the thermal conductivity of He is approximately six times that of air and other etching gases, which enables excellent temperature control.
Fountyl Technologies Pte Ltd. is located in Singapore, Fountyl produced electrostatic chuck has the function of normal operation in a vacuum atmosphere. It plays a role in clamping and temperature control of wafers in high vacuum plasma or specialty gas environments, assisting semiconductor process equipment in changing the electrical characteristics and physical form of specific areas of the wafer to present specific functions. and through a series of other complex and demanding processes, the wafer is eventually transformed into a complex integrated circuit structure. electrostatic chucks and electrostatic chuck heaters are widely used in semiconductor core processes and are one of the core components in key processes such as ion implantation, etching, and vapor deposition. and hot-selling to Southeast aisa and all over the world, welcome to contact and further negotiation！
