Precision manufacturing - Porous ceramic air flotation plate
Core Technology Analysis
(1) Product Principle and Structural Design
The core of the porous ceramic air flotation plate lies in its efficient gas distribution system. Through precise gas distributors, compressed air can be evenly dispersed throughout the bottom surface, forming a fine and powerful air film, thereby establishing an almost frictionless suspended state between the material and the carrier. The key to this design lies in the meticulous fabrication of the sealing device, ensuring balanced pressure distribution and the continuity of the air film, even under complex conditions, maintaining stability.
(2) Detailed Explanation of Key Components
Gas Distributor: Utilizing a micro-hole or micro-slot structure, it ensures that the gas is evenly distributed across the entire bottom surface, providing stable supporting force.
Sealing Device: Set around the edge of the air flotation plate, it prevents gas leakage and protects the interior from external particle intrusion, maintaining a high vacuum degree.
(3) Performance Index Comparison
Compared with traditional sliding rails, the air flotation plate demonstrates significant advantages in bearing capacity, motion accuracy, and response speed:
Bearing Capacity: Can easily bear hundreds of kilograms of weight without losing balance, suitable for various load conditions.
Motion Accuracy: Thanks to the air cushion effect, the positioning error is extremely small, typically less than ±1 μm, far higher than conventional sliding rails.
Response Speed: Due to almost no friction resistance, the start-up and stop reactions are extremely sensitive, significantly reducing cycle time and improving production efficiency.
Product Features
Ultra-precise flattening technology: Utilizing powerful vacuum force, it provides excellent flattening capability, crucial for high processing speeds.
Ultra-thin air gap design: Micron-level air gap, increasing stiffness and achieving precise control.
Soft carbon material substrate: Porous ceramics + graphite material, ensuring no damage to the glass surface during transportation, suitable for the handling of various precision materials.
Fountyl Technologies Pte Ltd., specialize in local manufacturing solutions for the semiconductor industry. with more than 20 years of professional experience, we serve customers from Southeast Asia, North America, Europe, Japan and Korea. our main products include silicon carbide wafer PIN chuck, porous ceramic vacuum chuck, ring groove chuck, transparent vacuum chuck, ceramic end effector, ceramic air floating guide rail, ceramic beam, electrostatic chuck, ceramic heater and various customized ceramic precision parts, which are made of silicon carbide, alumina, aluminum nitride, porous ceramics, aluminum silicon carbide, silicon nitride, zirconia, quartz glass and other high-performance materials.
