High density ceramic vacuum chuck (porous ceramic vacuum chuck), kahi mea porous ceramic kūikawā me ka nui o ka pore o 2 a 3 microns, ʻaʻole maʻalahi ke kāohi ʻia, kiʻekiʻe kiʻekiʻe ka ikaika, ʻāpana o ka adsorption wahi, akā hiki ke hoʻohana ʻia ma ke ʻano he ea lana anuu, hoʻohana nui ʻia i nā semiconductors, panels, kaʻina laser a me ka paheʻe laina laina ʻole.