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Ring Groove Chuck
Home
Products
Ring Groove Chuck
Products Categories
Products
Wafer pin silicon carbide chuck
Ring Groove Chuck
Porous ceramic chuck
Air Floating Table
Ceramic arm
Electrostatic Chuck
Ceramic beam & Guide
Ceramic Piston
AISiC Parts
Ceramic parts
Quartz Parts
Materials
Alumina Ceramics
Zirconia Ceramics
Silicon Carbide
Silicon Nitride
Aluminum Nitride
Porous Ceramics
Aluminum Silicon Carbide
Quartz Glass
PEEK
Featured Products
Alumina ceramics with excellent plasma corrosion resistance and high wear resistance
Zirconia used for wear resistant parts, heat resistant parts
Silicon nitride ceramic with excellent physical, chemical, and mechanical properties
Silicon carbide used for corrosion resistant parts, seals parts, high temperature resistant parts, guide rails and square beams
Aluminum nitride ceramic used for heat dissipating parts and corrosion resistant parts
Porous ceramic with high temperature resistance, high strength, good chemical stability
Aluminum silicon carbide ceramics used for aerospace, automotive, military, electronics, sports utensil fields
Quartz glass melted with various kinds of pure natural quartz
PEEK material with high-performance engineering plastic in excellent heat resistance, chemical resistance, mechanical strength and dimensional stability
Wafer pin silicon carbide chuck(wafer clamping, prealigner chuck) used for semiconductor field
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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.
2023-11-27
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