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Silicon carbide chuck (also call wafer clamping), is industrial chuck commonly used in the semiconductor industry , with high temperature resistance, corrosion resistance, wear resistance and other characteristics. It is usually made of silicon carbide or alumina ceramic material with a raised point-like structure on the surface to provide better adsorption and stability.

Prealigner chuck are widely used in semiconductor production equipment to absorb, fix, transfer and handle silicon wafers, wafers and various workpieces and materials.

Ring groove chuck (groove chuck) is a commonly used industrial chuck in the semiconductor industry, with high temperature resistance, corrosion resistance, wear resistance and other characteristics. Usually made of silicon carbide or alumina ceramic materials.

It is widely used in semiconductor production equipment to absorb, fix, transfer and handle silicon wafers, wafers and various workpieces and materials.

Porous ceramic chuck is also called microporous ceramic chuck, which means that a uniform solid or vacuum body is produced through a special nano powder manufacturing process, and a large number of connected or closed ceramic materials are generated inside the material through high temperature sintering. with its special structure, it has the advantages of high temperature resistance, wear resistance, chemical corrosion resistance, high mechanical strength, easy regeneration and excellent thermal shock resistance, which can be used for high temperature filtration materials, catalyst carriers, porous electrodes of fuel cells, sensitive components, separation membranes, bioceramics, etc., present the unique application advantages in chemical industry, environmental protection, energy, electronics, biochemistry.

The ceramic end effector with High functional, high temperature durability, high wear resistance is used for a long time in a high temperature environment without causing damage, and the wear of the material to be moved is also reduced to a minimum, effectively controlling the diffusion of impure substances to the moved body, and the surface can also be processed according to customer requirements with special dimensions and high functional characteristics.

Ceramic end effector for chip disk drive of semiconductor equipment, precision ceramic parts have good structural strength, high temperature resistance, high pressure resistance, good precision, good parallelism, dense and uniform organization, high strength. It has been used by semiconductor production factory for many years. Fountyl has a group of excellent engineers with unique and excellent skills in ceramic alien processing projects. alien processing technology is our company's strength.

Silicon carbide ceramic air floating movement platform, silicon carbide ultra-precision mobile platform, silicon carbide guide rail, silicon carbide slide rail, silicon carbide vacuum sucker, silicon carbide mirror, silicon carbide beam, silicon carbide workpiece table and a series of precision silicon carbide structural parts for lithography machine, are one of the core components of the lithography machine. Its main function is to carry the wafer to do high-speed ultra-precision movement according to the specified movement trajectory and complete a series of actions required for exposure, including up and down, alignment, wafer profile measurement and exposure, requiring a motion accuracy of 2nm in the case of high-speed movement.

Precision ceramic piston is composed of two parts of the piston sleeve and the piston rod. It is formed by imported high purity raw powder by static pressing, sintered by 1700 degrees temperature, and then precision machining. Reasonable control of the piston sleeve and the piston rod with clearance is very high precision, cylindricity and taper are micron level.