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OEM 1600mm Large Size Air Floating Platform for Customized Solutions

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Microporous Ceramic Vacuum Chuck

Microporous Ceramic Vacuum Chuck
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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

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Alumina ceramics with excellent plasma corrosion resistance and high wear resistance
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We have developed novel porous ceramics whose pore sizes can be made in the range of less than 1 micron to hundreds of microns. Air is drawn out through tiny pores, and the processed material is p...

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High density ceramic vacuum chuck (porous ceramic vacuum chuck), a special porous ceramic material with a pore size of 2 to 3 microns, is not easy to block, high vacuum force, part of the area ads...

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