Square beam & guide rail for ultra-precision motion platform and detection equipment

Taking the vacuum chuck assembly as an example, the material used in the earliest 2 inch and 4 inch wafer era is aviation aluminum, but it has encountered the bottleneck of ultra-high flatness (better than 1 micron) in the era of large-size wafers (8 "and more than 8"), which cannot meet the hard index of ultra-high flatness and is eliminated. Next, alumina material as a transition, its elastic modulus, light weight, thermal conductivity and expansion coefficient and silicon carbide dwarf, but not on some embarrassing; After the breakthrough in the preparation technology of large-size and complex special-shaped hollow structure silicon carbide ceramics, components including ultra-precision workpiece base, ultra-precision air float guide, and wafer transmission arm have been upgraded.

Not only the above-mentioned silicon carbide ceramic parts that meet the ultra-high precision hard indicators on flatness, parallelism, and verticality, for the high-purity silicon carbide ceramic parts required for the wafer diffusion, doping, etching processes in the semiconductor industry, especially in the high-purity CVDSiC material preparation technology, has a mature process technology, and has realized the manufacture of high-purity silicon carbide ceramic crystal boat, silicon carbide ceramic bearing plate, silicon carbide ceramic air floating movement platform, silicon carbide ultra-precision moving platform, silicon carbide guide rail, silicon carbide slide rail components.

In the future, we will further expand the application of silicon carbide materials in the semiconductor industry and contribute to the upgrading of the semiconductor industry chain and silicon carbide ceramic industry. China's precision silicon carbide ceramic components independent research and domestic application promotion has just started, with the vigorous development of semiconductor industry, the market demand for this kind of high-end ceramic structure will be more and more large, silicon carbide with its excellent physical and chemical properties, in the semiconductor industry has broad application prospects.