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Ceramic square beam for ultra-precision motion platform and detection equipment
Main product

Ceramic square beam for ultra-precision motion platform and detection equipment

The application of silicon carbide ceramic beam:

It is one of the core components of lithography machine, its main function is carrying the wafer follow a prescribed trajectory for high speed precision movement and action needed to complete the series of exposure, including the top and bottom piece, alignment, wafer surface measurement and exposure.

    The product feature 

    Silicon carbide ceramics not only has excellent mechanical properties at room temperature, such as high flexural strength, excellent oxidation resistance, good corrosion resistance, high wear resistance and low friction coefficient, and high temperature mechanical properties (strength, creep resistance, etc.) are known well in ceramic material. Silicon carbide features corrosion resistance, high-temperature resistance, high strength, good thermal conductivity and impact resistance.

    1. High strength

    2. High temperature resistance

    3. Strong corrosion resistance

    4. High oxidation resistance

    5. Good thermal shock resistance

    6. High thermal conductivity

    Purpose:

    Ultra-precision motion platforms, more precise detection equipment.

    Customized products can be produced according to samples or drawings.

    Semiconductor-specific equipment and precision testing equipment have extremely high requirements for core components.

    Requirements: Ultra-high lightweight (reducing motion inertia and motor load), ultra-high stability (ultra-precision processing requires high-precision motion and positioning, and minimal dimensional deformation due to factors such as thermal expansion), and cleanliness (high hardness and high wear resistance), can meet the technical requirements for the preparation of large-sized, hollow thin-walled, complex-structured, and precision silicon carbide structural components for precision equipment.

     

     

    Fountyl advantages:

    1, Japanese technology, independent R&D and production of silicon carbide ceramic materials;

    2, The longest beam size: 1600 mm

    3, Structure customization: lightweight structure, weight-reducing structures can be designed.

    4, High precision: ultra high precision, according to different structure and different size, please confirm the accuracy with customer.

    5, Can choose the material: alumina ceramics, silicon carbide ceramics.