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Silicon carbide used for corrosion resistant parts, seals parts, high temperature resistant parts, guide rails and square beams

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Alumina ceramics with excellent plasma corrosion resistance and high wear resistance

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Microporous Ceramic Vacuum Chuck

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Electrostatic chuck with compatibility, high-density, hight structural strength with customized

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Beryllium oxide ceramics with high thermal conductivity and low loss characteristics

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Zirconia used for wear resistant parts, heat resistant parts

Zirconia used for wear resistant parts, heat resistant parts
Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.
Silicon nitride ceramic with excellent physical, chemical, and mechanical properties

Silicon nitride ceramic with excellent physical, chemical, and mechanical properties
Quartz glass structural part used for semiconductor, optics, optical communication, photovoltaic and LED field

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