High density ceramic vacuum chuck (porous ceramic vacuum chuck), a special porous ceramic material with a pore size of 2 to 3 microns, is not easy to block, high vacuum force, part of the area ads...
The pore size of the special porous ceramic material is 2 ~ 3 microns, and it is difficult to plug with large vacuum force and partial area adsorption. It can also be used as an air floating ...