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Hoʻolālā a hana
Hāʻawi ʻia ʻo 12 inch Fab e hōʻoia i ka hana maoli, hāʻawi i ka hana hou a me ka hoʻoponopono, a hōʻoia i ka hoʻomohala ʻana a me ka hoʻolālā.
Me nā mea hana kaʻina hana a me ka hoʻomohala ʻenehana kaʻina hana o ka semiconductor a me ka kaapuni hoʻohui, nā kuʻuna electrostatic chucks me ka hoʻohana ʻana i nā mea polymer organik, metala oxides a me nā mea seramika e like me ka dielectrics ʻaʻole kūpono loa me nā mea like me nā wafers silicon, sapphire a me ka silicon carbide. No laila, e ulu mālie nā puʻupuʻu electrostatic i kūpono me ka mua, ka lua a me ke kolu o ka hanauna semiconductor wafer grippers.
ʻO Polymer Electrostatic Chuck / Heater
ʻO ka polymer dielectric material (Polymer) ka mea i hoʻohana nui ʻia i ka electrostatic chuck material, ʻo kāna kaʻina hoʻomākaukau ʻana ʻo ia ka mea ʻoi loa, polymer dielectric mea ma hope o ka polymer hoʻololi ʻana i ka mālama ʻana, uila, mechanical, wela ke kūpaʻa, e hoʻomaikaʻi nui ʻia nā waiwai kūʻē halogen. Hoʻohālikelike ʻia ka mea dielectric e nā hana hoʻohui ʻē aʻe, a laila hoʻopaʻa ʻia e ka ukana kaumaha multistage vacuum, a ua hoʻokumu ʻia kahi papa insulation dielectric ma waena o nā electrodes kūloko.
Polima Electrostatic Chuck
Hoʻohana ʻia ka ʻenehana hoʻololi polymer e hoʻokō i ka resistivity bulk kiʻekiʻe a me ka mau dielectric pili, a loaʻa ka ikaika clamping paʻa.
Hiki i nā mea dielectric kiʻekiʻe kiʻekiʻe ke hōʻemi i ka pilikia o nā mea ʻāpana a hoʻemi i ka neʻe ʻana o ka ion.
Hiki ke kūlike ka ʻokoʻa o nā mea hoʻopili me ka hoʻopili ʻana i nā wafers o nā mea like ʻole.
ʻOi aku ka maikaʻi o ka corrosion i ka halogen a me ka lewa plasma.
ʻO ke kumukūʻai kiʻekiʻe, ka manawa ʻae pōkole, kūpono no ka hoʻomohala ʻana i ke kaʻina huahana a me ka hōʻoia hoʻomohala ʻana i nā mea hana hou.
Al₂O₃ Huka Electrostatic
Hoʻomalu ʻia ka resistivity volume e ka ʻenehana coagulation ceramic a me ke kaʻina hana co-firing e loaʻa ai ka ikaika paʻa lōʻihi.
ʻO ke ʻano o loko o ka sintering wela kiʻekiʻe he paʻa a paʻa ke ʻano kristal, a hiki ke loaʻa ka mana paʻa o kahi wā wela nui.
Hoʻemi ʻia ka hoʻoheheʻe ʻana i ke ahi i hoʻohui ʻia i ka neʻe ʻana o ka ion.
ʻO ka hana mau i loko o ka ea hau halogen plasma.