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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

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Beryllium oxide ceramic parts used for auto and semiconductor and large integrated circuit

Beryllium oxide ceramic parts used for auto and semiconductor and large integrated circuit
Beryllium oxide ceramics with high thermal conductivity and low loss characteristics

Beryllium oxide ceramics with high thermal conductivity and low loss characteristics
Square beam & guide rail for ultra-precision motion platform and detection equipment

Square beam & guide rail for ultra-precision motion platform and detection equipment
Porous air floating platform with the load transfer technology of non-contact mode for semiconductor industry

Porous air floating platform with the load transfer technology of non-contact mode for semiconductor industry
Silicon nitride ceramic with excellent physical, chemical, and mechanical properties

Silicon nitride ceramic with excellent physical, chemical, and mechanical properties
Aluminum nitride ceramic used for heat dissipating parts and corrosion resistant parts

Aluminum nitride ceramic used for heat dissipating parts and corrosion resistant parts

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Zirconia used for wear resistant parts, heat resistant parts

Zirconia used for wear resistant parts, heat resistant parts
Silicon carbide used for corrosion resistant parts, seals parts, high temperature resistant parts, guide rails and square beams

Silicon carbide used for corrosion resistant parts, seals parts, high temperature resistant parts, guide rails and square beams
Quartz glass melted with various kinds of pure natural quartz

Quartz glass melted with various kinds of pure natural quartz
Porous ceramic with high temperature resistance, high strength, good chemical stability

Porous ceramic with high temperature resistance, high strength, good chemical stability
Ceramic structural parts (ceramic parts)

Ceramic structural parts (ceramic parts)
Wafer pin chuck used for semiconductor exposure device and wafer inspection device

Wafer pin chuck used for semiconductor exposure device and wafer inspection device
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Application and characteristics of porous chuck table

Porous chuck table, also known as: porous ceramic vacuum suckerIt is composed of a metal (or ceramic) base and a special porous ceramic combination, the internal precision air conduction design, w...

Molding process and technology development trend of special ceramics

Because of special ceramics with high temperature resistance, wear resistance, corrosion resistance, high hardness, high precision and other advantages that metals and plastics do not have, and in...

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