High-Quality Ceramic Vacuum Chuck End Effectors for Precision Handling

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Quartz glass melted with various kinds of pure natural quartz

Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

Silicon nitride ceramic with excellent physical, chemical, and mechanical properties

Silicon carbide used for corrosion resistant parts, seals parts, high temperature resistant parts, guide rails and square beams

Porous air floating platform with the load transfer technology of non-contact mode for semiconductor industry

Electrostatic chuck with compatibility, high-density, hight structural strength with customized

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High-Quality Ceramic Vacuum Chuck End Effectors for Precision Handling

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