Reliable Large Size Silicon Carbide Ceramics Service for Superior Performance

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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

Alumina ceramics with excellent plasma corrosion resistance and high wear resistance

Zirconia used for wear resistant parts, heat resistant parts

Beryllium oxide ceramic parts used for auto and semiconductor and large integrated circuit

Electrostatic chuck with compatibility, high-density, hight structural strength with customized

Beryllium oxide ceramics with high thermal conductivity and low loss characteristics

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Reliable Large Size Silicon Carbide Ceramics Service for Superior Performance

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