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Microporous Ceramic Vacuum Chuck

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Aluminum nitride ceramic used for heat dissipating parts and corrosion resistant parts

Aluminum nitride ceramic used for heat dissipating parts and corrosion resistant parts
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Aluminum silicon carbide ceramics used for aerospace, automotive, military, electronics, sports utensil fields
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Quartz glass structural part used for semiconductor, optics, optical communication, photovoltaic and LED field

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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

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