Properties of microporous ceramic chuck

High density ceramic vacuum chuck (porous ceramic vacuum chuck), a special porous ceramic material with a pore size of 2 to 3 microns, is not easy to block, high vacuum force, part of the area adsorption, but also can be used as an air floating platform, widely used in semiconductors, panels, laser process and non-contact linear slide. Porous ceramic vacuum chuck are sealed with air to maintain transmission, and device applications are limited to working platforms with flat, non-porous surfaces. Product categories: Ceramic plunger, ceramic pump core, ceramic valve core, ceramic piston, ceramic bushing, ceramic chuck, microporous ceramics....etc. Materials: Alumina, zirconia, silicon nitride, silicon carbide. The user is usually a machine operator. In the field of metal processing, this is a safe and reliable workpiece transfer.

Porous ceramics chuck are also called nanoporous vacuum chuck, which refers to the uniform solid or vacuum sphere produced by a special nano powder manufacturing process, and a large number of connected or closed ceramic materials are generated inside the material through high temperature sintering. With its special structure, it has the advantages of high temperature resistance, wear resistance, chemical corrosion resistance, high mechanical strength, easy regeneration and excellent thermal shock resistance...etc., which can be used for high temperature filtration materials, catalyst carriers, porous electrodes of fuel cells, sensitive components, separation membranes, bioceramics...etc., showing unique application advantages in chemical industry, environmental protection, energy, electronics, biochemistry fields.

Microporous ceramic vacuum chuck has the characteristics of high porosity, high strength, high flatness, and very strong adsorption capacity, and is widely used in semiconductor, magnetic materials, electronics industry. The main characteristics of the microporous ceramics processed by Fountyl are: good flatness and parallelism, dense and uniform structure, high strength, good permeability, uniform adsorption and easy dressing.

The vacuum chuck is required in high porosity and ultramicropore occasioin, Fountyl microporous ceramic hollow chuck , with pore sizes ranging from 30 microns to 60 microns. There are many kinds of structural shapes of microporous ceramics, which are composed of countless different specifications of aluminum silicate ceramic particles, which form a free gap of tens of microns to 0.1 microns in different rules when the gathering, after incorporation of high temperature (1500℃) dissolution adhesives, and then sintering to obtain a large strength, many voids but small, corrosion resistance, high temperature resistance of microporous ceramics. Micro-porous ceramic material processed by special process, using uniform particles, the processed ceramic plate has uniform aperture distribution, smooth surface after grinding, can replace foreign imported materials, is a special tools for adsorption and loading in various semiconductor chip production process, used in thinning, slicing, cleaning, handling processes. widely used in semiconductor, printing, electronic ceramics industries of vacuum chuck equipment.

Fountyl Technologies PTE Ltd, is focusing on semiconductor manufacturing industry, main products include: Pin chuck, porous ceramic chuck, ceramic end effector, ceramic square beam, ceramic spindle, welcome to contact and negotiation！