Why can't the furnace tube silicon carbide boat be cleaned dry?

What is SiC boat?

SiC boat, is silicon carbide boat. Silicon carbide boat is used in the furnace tube, loaded with wafers for high temperature treatment of high temperature accessories. Because silicon carbide material has high temperature resistance, chemical corrosion resistance and good thermal stability, it is widely used in various heat treatment processes, such as diffusion, oxidation, CVD, annealing and so on.

How many different manufacturing processes are there for SiC boat?

1. A layer of SiC film is CVD on the surface of the stone ink crystal boat. The main body of this type of boat is graphite and is processed in one body. However, graphite porous, easy to produce particles, must be coated with a layer of SiC film on the surface of the stone ink crystal boat, due to the CTE(thermal expansion coefficient) mismatch between the graphite body and SiC film, SiC film is usually easy to flake off after multiple rise and cooling use, resulting in the production of particles. This kind of boat is the cheapest and has a service life of about a year.

2, A layer of SiC film is CVD on the recrystallized SiC crystal boat. The recrystallized SiC boat is porous and easy to produce particles, so several unit components of the recrystallized SiC boat need to be pre-formed, sintered, and then processed separately, and then each unit component is bonded with Si paste at high temperature, bonded into a crystal boat, and then CVD coated with SiC film. This recrystallized SiC boat has the longest manufacturing process and is expensive, but the CVD coating on the surface is also damaged, and the life span is about 3 years.

3, One shaped SiC boat The whole boat is composed of SiC material. SiC needs to be formed from the powder and fired into the corresponding shape of the integrated crystal boat. It is very expensive but durable and does not produce particles. However, this kind of crystal boat contains 10 to 15% free silicon, which is easy to be eroded by F and Cl, resulting in particles.

Why can't you dry clean it?

In summary, the crystal boat coated with a layer of SiC film with CVD is easy to fall off the surface SiC coating during dry cleaning, resulting in particles; There is a small amount of free silicon in the integrated SiC crystal boat, which is easy to be eroded by the gas containing F and Cl and produce particles, causing pollution.

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