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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

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Aluminum nitride ceramic used for heat dissipating parts and corrosion resistant parts

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Microporous Ceramic Vacuum Chuck

Microporous Ceramic Vacuum Chuck
Porous ceramic with high temperature resistance, high strength, good chemical stability

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Silicon nitride ceramic with excellent physical, chemical, and mechanical properties

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Wafer pin chuck used for semiconductor exposure device and wafer inspection device

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Square beam & guide rail for ultra-precision motion platform and detection equipment
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