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Porous air floating platform with the load transfer technology of non-contact mode for semiconductor industry

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Wafer pin chuck used for semiconductor exposure device and wafer inspection device

Wafer pin chuck used for semiconductor exposure device and wafer inspection device
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Ceramic end effector(ceramic finger, ceramic robot arm)

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Microporous Ceramic Vacuum Chuck

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Aluminum silicon carbide ceramics used for aerospace, automotive, military, electronics, sports utensil fields

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High density ceramic vacuum chuck (porous ceramic vacuum chuck), a special porous ceramic material with a pore size of 2 to 3 microns, is not easy to block, high vacuum force, part of the area ads...

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Porous chuck table, also known as: porous ceramic vacuum suckerIt is composed of a metal (or ceramic) base and a special porous ceramic combination, the internal precision air conduction design, w...

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