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Porous air floating platform with the load transfer technology of non-contact mode for semiconductor industry

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Porous silicon carbide chuck(reaction bonded SiC chuck, sintered silicon carbide chuck)

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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.
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