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Microporous Ceramic Vacuum Chuck
ʻO nā hiʻohiʻona kīʻaha kīwī
ʻO ka paʻa ikaika: ka ʻae ʻana o ka ea a me ka wai permeability, e hōʻoia i ka ikaika like ʻole a me ka adsorption paʻa o ka wafer silicon i ke kaʻina wili me ka ʻole o ka paheʻe.
ʻO ke ʻano paʻa a me ke ʻano like ʻole: ʻO ka hoʻohana ʻana i ka micro-porous ceramic material me ke ʻano paʻa a me ke ʻano like ʻole, ʻaʻole maʻalahi ke adsorb i ka lepo silika, a maʻalahi ka hoʻomaʻemaʻe ʻana i ka chuck.
ʻO ka ikaika kiʻekiʻe: ʻaʻohe deformation i ka wā e wili ai, e hōʻoia i ke koʻikoʻi o ka wafer silicon i kēlā me kēia wahi i ka wā e wili ai, a ʻaʻole maʻalahi ka hana ʻana i nā ʻano o ka hāʻule ʻana o ka lihi, nā ʻōpala.
ʻO ke ola lōʻihi: maikaʻi ka paʻa ʻana o ke ʻano o ka ʻili, lōʻihi ka pōʻai lole a liʻiliʻi ka nui o ka lole, no laila ke ola kiʻekiʻe.
ʻAʻahu maʻalahi: ʻaʻohe māhā, ʻāpana, ʻohi ʻana i nā ʻano mea i ka wā e kāhiko ai.
Māmā: Ma muli o ke ʻano o loko o nā pores, ʻo ka coefficient gravity kikoʻī he 1.6-2.8.
ʻO ka insulation kiʻekiʻe: insulating material, hoʻopau i ka uila static.
Mana Pono
| waeʻano | Mea kumu | Adsorption ili mea | Nui | Palahalaha | hohonu o ka like like |
| Poha poha | Aluminum Aluminum | Porous SIC | ≤12μm | ≤15μm | ≤20μm |
| Kila kohu ʻole | ≤10μm | ≤15μm | |||
| alumina | ≤5μm | ≤8μm | |||
| Silicon Carbide | ≤3μm | ≤8μm | |||
| Loaʻa ka porous ceramic chuck i nā kikoʻī a me nā nui, hiki ke hoʻohana ʻia i ka laina 3-inch, 4-inch line, 5-inch line, 6-inch line, 8-inch line a me 12-inch line, a hiki ke hoʻopilikino ʻia e like me nā kikoʻī a me nā nui āu e pono ai. | |||||
| ʻO ka nui loa o ka hihia o kēia manawa: 1600 * 1600m, ʻo 50mm ka mānoanoa; | |||||
ʻO nā hiʻohiʻona o nā mea keramika porous:
Mea nui: alumina kala: ʻeleʻele, hao hina
Maʻiʻo alumina: 92% Maʻiʻo wai: 0%
Aperture: 2 ~ 30um Porosity: 35 ~ 40%
Ka ikaika kulou:6kgf/cm2 (Mpa) Lakiō leo: 2.28g/cm3
ʻO ke ʻano o ka pahu seramika
E like me ka hoʻohana ʻana, ua māhele ʻia ka Ceramic chuck i:
ʻO ka mīkini hoʻoheheʻe i hoʻolako ʻia me: abrasive disc chuck, silicon wafer, sapphire substrate a me nā mea lahilahi ʻē aʻe;
Hoʻolako ʻia ka mīkini ʻoki me: scribing chuck, silicon wafer, semiconductor compound wafer a me nā ʻoki ʻē aʻe;
ʻO ka mīkini hoʻomaʻemaʻe i lako me: hoʻomaʻemaʻe chuck;
Hoʻolako ʻia ka mīkini wehe kiʻiʻoniʻoni me: film removing chuck;
Laminating machine i lako me: laminating chuck;
ʻO ka mīkini paʻi i lako me: paʻi chuck.
ʻO ka hōʻoia maikaʻi
Loaʻa iā Fountyl nā makahiki he nui o ka ʻike loea e pili ana i ka ʻenekinia ceramic precision a me ka ultra-precision processing a me ka hana ʻana, nā ʻano mea like ʻole o ke kino a me ke kemika a me nā mea ana geometric, e hōʻoia i ka paʻa o ka hana a me ka kūlike o ka huahana no ka ceramic chuck.
Hoʻohana Huahana
ʻO Porous Chuck (adsorption working table) he mea ia i hoʻohana ʻia i ke kahua hana semiconductor a hōʻuluʻulu ʻia ma kahi mīkini kākau a i ʻole mea nānā. He huahana ia e hiki ai ke hoʻohana i ke ʻano porous a me ke kaomi maikaʻi ʻole o ka ʻili o ka papa hana no ka mālama ʻana i ka wafer silika lahilahi. ʻOki ka mīkini scribing i ka wafer silika me ka laula e pili ana i 20μm, no laila ke kiʻekiʻe loa ke koi ʻana i ka palahalaha a me ka parallelism o ka ʻili adsorption wafer. E like me kā lākou mau hiʻohiʻona, ʻokoʻa nā papa hana pore like ʻole, e like me nā microporous ceramics me kahi ākea ākea nui a me ka nui pore liʻiliʻi, hoʻohana pinepine ʻia i ka kānana bacterial a me nā kahua hoʻoponopono microbial; Hoʻohana pinepine ʻia nā ceramics Mesoporous me ko lākou anawaena kikoʻī i ka hoʻokaʻawale ʻana, adsorption catalysis field. ʻO ka macroporous ceramics ka mea maʻamau no ka kānana ʻinoʻino o nā mea me ka nui a me ka nui nui.