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10 common wafer industry terms
The wafer begins with crystal growth, and the following are several industry terms related to crystallography. Common crystals in daily life include snowflakes, gems and table salt. Through the examples in Figure 1 and the definitions in Table 1, the specific meanings of crystal, ingot, wafer, epitaxy, grain, seed crystal, single crystal, polycrystalline, amorphous and substrate can be roughly understood.
The above figure takes silicon material as an example, crystal (a), ingot (b), wafer (c), epitaxy (d), grain (e), seed crystal (f), single crystal (g), polycrystalline (h), amorphous (i) and substrate (j), note: (d), (g), (h) and (i) are schematic drawings, and (a), (b), (c), (e), (f) and (j) are photographs of objects
Common wafer industry appellation terms
NAME |
DEFINITION |
CRYSTAL |
Objects arranged in crystallographic order over long distances |
INGOT, BOULE |
Polycrystalline or monocrystalline in cylindrical or rectangular shape |
WAFER |
The ingot is turned into a sheet by a series of processing processes |
EPILAYER |
A single crystal wafer growing along its crystalline direction at the bottom of a single crystal village |
CRYSTALLITE, CRYSTAL GRAIN |
Crystals of relatively small size |
SEED CRYSTAL |
A small piece of single or polycrystalline material used to promote the growth of larger crystals of the same material |
MONOCRYSTALLINE CRYSTAL,SINGLE CRYSTAL |
A crystal grown from a nucleus has the same crystallographic orientation throughout its interior (except for the poor orientation caused by crystal defects), but its shape can be a regular polyhedron or an irregular arbitrary shape |
POLYCRYSTALLINE CRYSTAL |
The crystalline substance consists of more than two homogenous or dissimilar single crystals, the crystallographic orientation of each single crystal is mostly arbitrary, but under special conditions, it can also have a preferred orientation, and the single crystals are combined with each other through the grain boundary |
AMORPHOUS CRYSTAL |
An amorphous material in which the atomic arrangement does not have long-term ordered periodicity, but retains short-range ordered atomic arrangement |
SUBSTRATE |
A rigid or flexible substrate on which other processes can be performed, usually square in shape |
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