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Silicon carbide inoshandiswa kune corrosion resistant parts, zvisimbiso zvikamu, high tembiricha inodzivirira zvikamu, njanji uye masikweya matanda.
Silicon carbide ceramics ine yakanakisa mechanicha zvinhu pakupisa kwakajairika, senge simba rakakura, kuomarara kwepamusoro, yakakwirira elastic modulus, yakanakisa tembiricha yakadzikama, senge yakakwira yekushisa conductivity, yakaderera thermal yekuwedzera coefficient, uye yakanaka chaiyo kuoma uye optical processing zvivakwa, kunyanya zvakakodzera. yekugadzirira photolithography muchina uye mamwe akabatanidzwa edunhu midziyo yekunyatsoita ceramic structural zvikamu. Zvakadai sekushandiswa mumuchina wephotolithography kunyatsofamba tafura yekushanda, skeleton, mukombe wekusveta, ndiro yakanyoroveswa nemvura uye girazi rekuyeresa, grating uye zvimwe zvikamu zveceramic structural, Fountyl zvinhu zvitsva mushure memakore ekutsvagisa kwehunyanzvi, kugadzirisa saizi yakakura, madziro akatetepa, hollow uye imwe yakaoma chimiro chesilicon carbide zvimiro zvemagadzirirwo nemagadzirirwo uye matambudziko ekugadzirira, ichipaza nepakati pehunyanzvi bhodhoro remhando iyi yechokwadi silicon carbide yezvimiro zvikamu zvekugadzirira tekinoroji. Yakasimudzira zvakanyanya kukwidziridzwa kwezvikamu zvakakosha zvemugadziriso zvinoshandiswa mune yakabatanidzwa dunhu rekugadzira michina.
● Silicon carbide ceramics inonyanya kusanganisira pressureless sintering silicon carbide (SSiC), reaction-sintered silicon carbide (RBSC), kemikari vapor deposition silicon carbide (CVD-SiC).
● Silicon carbide ine zvinhu zvakasiyana-siyana zvakanakisa: super hard, kupfeka kusagadzikana, high thermal conductivity uye mechanical simba, yakaderera thermal yekuwedzera coefficient, yakanakisa thermal stability, low density, high specific stiffness, non-magnetic.
● Parizvino, silicon carbide ceramics inoshandiswa mumaindasitiri akasiyana-siyana akadai sendege, aerospace uye indasitiri yenyukireya, senge ceramic zvikamu zvemhando yepamusoro midziyo yesilicon carbide ceramic reflector uye IC integrated circuit kugadzira, kupisa kupisa uye bulletproof zvinhu pasi pemamiriro ezvinhu akanyanya.
Zvimiro zvechaiyo ceramic zvimiro zvikamu zveyakasanganiswa redunhu kugadzira michina:
① Yakanyanya kureruka: Kuti uderedze kufamba inertia, kuderedza mutoro wemota, kuvandudza mafambiro, kurongeka uye kugadzikana, zvikamu zvezvimiro zvinowanzo shandisa lightweight chimiro dhizaini, chiyero chakareruka i60-80%, kusvika 90%;
② Yakakwira fomu-chinzvimbo kurongeka: Kuti uwane yakakwira-chaiyo kufamba uye kumira, zvikamu zvechimiro zvinofanirwa kuve nechimiro chakanyanya uye chimiro chechokwadi, kufuratira, kufanana uye perpendicularity inodiwa kuve isingasviki 1μm, uye chimiro uye kurongeka kwenzvimbo kunodiwa kuve isingasviki 5μm.
③ Yakakwirira dimensional kugadzikana: Kuti uwane yakakwira-chaiyo kufamba uye chinzvimbo, zvikamu zvechimiro zvinofanirwa kuve neakanyanya kudzika mativi, kwete kuburitsa dhiri, uye yakakwirira yekupisa conductivity, yakaderera kupisa kwekuwedzera coefficient, zvisiri nyore kugadzira yakakura dimensional deformation. ;
④ Yakachena uye isina kusvibiswa. Iwo maumbirwo ezvikamu anodiwa kuti ave neakanyanya kuderera kukweshana coefficient, diki kinetic simba kurasikirwa panguva yekufamba, uye pasina kugaya kusvibiswa. Silicon carbide zvinhu zvine yakakwira elastic modulus, yekupisa conductivity uye yakaderera kupisa kwekuwedzera coefficient, haisi nyore kuburitsa bending stress deformation uye thermal strain, uye ine polishability yakanakisa, inogona kugadzirwa kune yakanakisa girazi; Naizvozvo, Iyo ine mabhenefiti makuru ekushandisa silicon carbide seyakanyatso dhizaini yemidziyo yakakosha yemasekete akabatanidzwa senge photolithography muchina, Silicon carbide ine zvakanakira kunaka kwemakemikari kugadzikana, yakakwirira mechanical simba, yakakwirira yekupisa conductivity uye kuderera kwekuwedzera kwekuwedzera kwemafuta, uye inogona kuiswa mukupisa kwakanyanya, kudzvanywa kwakanyanya, ngura uye nemwaranzi yenzvimbo dzakanyanyisa.
Silicon carbide ine mabhenefiti ekugadzikana kwekemikari yakanaka, kusimba kwemagetsi, kukwira kwekushisa kwekushisa uye kuderera kwekuwedzera kwekuwedzera kwemafuta, uye inogona kuiswa mukupisa kwakanyanya, kudzvanywa kwakanyanya, ngura uye nemwaranzi yenzvimbo dzakanyanyisa.
Midziyo yakakosha yedunhu rakabatanidzwa inoda kuti zvinhu zvechikamu zvive nehunhu hwehuremu huremu, simba rakakura, high thermal conductivity uye yakaderera thermal yekuwedzera coefficient, uye dense uye yunifomu isina kukanganisa. Zvikamu zvinosungirwa kuve nepamusoro-soro kurongeka uye kugadzikana kwedimensional kuve nechokwadi chekupedzisira-chaiyo kufamba uye kutonga kwemidziyo. Silicon carbide ceramics ine yakakwira elastic modulus uye kuomarara kwakananga, isiri nyore kukanganisa, uye ine yakakwira yekupisa conductivity uye yakaderera kupisa kwekuwedzera coefficient, yakanyanya kugadzikana yemafuta, saka silicon carbide ceramics chinhu chakanakisa chiumbwa, parizvino mumubatanidzwa wedunhu kugadzira makiyi emidziyo yekuwana akasiyana siyana ekushandisa, senge lithography muchina nesilicon carbide inoshanda tafura, gwara renjanji, reflector, ceramic chuck, uye ceramic end effector.
Fountyl inogona kusangana nemuchina wephotolithography semumiriri weiyo yakabatanidzwa yekugadzira dhizaini yekugadzira kiyi midziyo ine saizi yakakura, isina madziro mutete, chimiro chakaomarara, chaiyo silicon carbide yezvimiro zvikamu zvekugadzirira tekinoroji, senge: silicon carbide vacuum chuck, gwara renjanji, ratidziro, tafura yekushanda. uye nhevedzano yechaiyo silicon carbide zvimiro zvikamu zvephotolithography muchina.
| Properties | Founyl | ||
| Density (g/cm3) | 2.98-3.02 | ||
| Young's Modulus (GPa) | 368 | ||
| Flexural simba (MPa) | 334 | ||
| Weibull | 8.35 | ||
| CTE (× 10-6/℃) | 100 ℃ | 2.8×10-6 | |
| 400 ℃ | 3.6×10-6 | ||
| 800 ℃ | 4.2×10-6 | ||
| 1000 ℃ | 4.6×10-6 | ||
| Thermal Conductivity(W/m·k) (20 ºC) | 160-180 | ||
| Chiyero chePoisson | 0.187 | ||
| Shear modulus (GPa) | 155 | ||