Gida
Kayayyaki
Silicon carbide da ake amfani da shi don ɓarna ɓangarorin juriya, sassan hatimi, sassa masu juriya da zafin jiki, hanyoyin jagora da katako mai murabba'i.
Silicon carbide yumbura suna da kyawawan kaddarorin injina a zafin jiki na al'ada, kamar ƙarfi mai ƙarfi, ƙarfi mai ƙarfi, matsakaicin ƙarfi mai ƙarfi, ingantaccen kwanciyar hankali mai ƙarfi, kamar babban haɓakar thermal, ƙarancin haɓakar haɓakar thermal, da ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙarfi da kaddarorin sarrafa gani, musamman dacewa. don shirye-shiryen na'urar daukar hoto da sauran kayan aikin da'ira don daidaitattun sassan tsarin yumbu. Kamar yadda amfani a cikin photolithography inji daidai motsi workpiece tebur, kwarangwal, tsotsa kofin, ruwa-sanyaya farantin da ma'auni madubi, grating da sauran yumbu tsarin sassa, Fountyl sabon abu bayan shekaru na fasaha bincike, warware babban size, bakin ciki bango, m da sauran hadaddun tsarin silicon carbide tsarin sassa daidaitaccen aiki da matsalolin shirye-shirye, karya ta hanyar ƙwanƙolin fasaha na wannan nau'in fasahar shirye-shiryen kayan aikin silicon carbide. Ya inganta sosai wajen gano mahimman sassa na tsarin da aka yi amfani da su a haɗaɗɗen kayan aikin kera da'ira.
● Silicon carbide yumbura galibi sun haɗa da silicon carbide (SSiC) mara ƙarfi, silicon carbide (RBSC) mai ɗaukar hoto (RBSC), sinadarin tururin siliki carbide (CVD-SiC).
● Silicon carbide yana da nau'ikan kyawawan kaddarorin: super wuya, sa juriya, high thermal conductivity da kuma inji ƙarfi, low thermal fadada coefficient, m thermal kwanciyar hankali, low yawa, high takamaiman stiffness, ba Magnetic.
● A halin yanzu, ana amfani da yumbu na silicon carbide a cikin masana'antu daban-daban kamar jirgin sama, sararin samaniya da masana'antar nukiliya, irin su yumbu sassa na kayan aiki masu mahimmanci don siliki carbide yumbu reflector da IC hadedde kewaye masana'antu, zafi musayar da kuma harsashi kayan a karkashin matsananci yanayi.
Fasalolin madaidaicin sassan tsarin yumbu don haɗaɗɗun kayan aikin kera:
① Maɗaukaki mai nauyi: Don rage ƙarancin motsin motsi, rage nauyin motar, inganta haɓakar motsi, daidaita daidaito da kwanciyar hankali, sassan tsarin gabaɗaya suna amfani da ƙirar ƙirar nauyi, ƙimar nauyi shine 60-80%, har zuwa 90%;
② High form-matsayin daidaito: Domin cimma high-madaidaici motsi da kuma matsayi, da tsarin sassa da ake bukata don samun musamman high tsari da matsayi daidaito, da flatness, parallelism da perpendicularity ake bukata ya zama kasa da 1μm, da kuma form kuma. Ana buƙatar daidaiton matsayi ya zama ƙasa da 5μm.
③ Babban kwanciyar hankali mai girma: Don cimma daidaitaccen motsi da matsayi, ana buƙatar sassan tsarin don samun kwanciyar hankali mai girma, ba don samar da iri ba, da haɓakar haɓakar thermal, ƙarancin haɓakar haɓakar thermal, ba sauƙin samar da nakasar girman girma ba. ;
④ Tsaftace kuma mara gurɓatacce. Ana buƙatar sassan tsarin don samun ƙarancin ƙarancin juzu'i, ƙarancin ƙarancin kuzari yayin motsi, kuma babu gurɓataccen ƙwayar cuta. Silicon carbide abu yana da madaidaicin maɗaukaki na roba, haɓakar zafin jiki da ƙarancin haɓaka haɓakar thermal, ba shi da sauƙi don samar da nakasar damuwa da yanayin zafi, kuma yana da kyakkyawan gogewa, ana iya sarrafa shi zuwa kyakkyawan madubi; Sabili da haka, Yana da fa'idodi masu yawa don amfani da silicon carbide azaman madaidaicin kayan ƙirar don kayan aikin maɓalli na haɗaɗɗun da'irori kamar injin photolithography, Silicon carbide yana da fa'idodin ingantaccen kwanciyar hankali na sinadarai, ƙarfin injina, haɓakar haɓakar thermal da ƙarancin haɓaka haɓakar thermal, kuma ana iya amfani dashi a cikin matsanancin zafin jiki, matsa lamba, lalata da radiation na matsanancin yanayi.
Silicon carbide yana da fa'idodi na ingantaccen kwanciyar hankali na sinadarai, ƙarfin injina mai ƙarfi, haɓakar zafin jiki mai ƙarfi da ƙarancin haɓakar haɓakar thermal, kuma ana iya amfani da shi a cikin babban zafin jiki, matsa lamba, lalata da radiation na matsanancin yanayi.
Maɓalli na kayan aiki na haɗaɗɗen kewayawa yana buƙatar kayan aikin kayan aikin suna da halaye na nauyin haske, ƙarfin ƙarfi, haɓakar zafin jiki mai ƙarfi da ƙarancin haɓakar haɓakar thermal, kuma suna da yawa kuma suna da daidaituwa ba tare da lahani ba. Ana buƙatar abubuwan da ake buƙata don samun daidaiton girman maɗaukaki da kwanciyar hankali mai girma don tabbatar da madaidaicin motsi da sarrafa kayan aiki. Silicon carbide tukwane suna da babban na roba modules da takamaiman taurin, ba sauki nakasawa, kuma yana da babban thermal conductivity da low thermal fadada coefficient, high thermal kwanciyar hankali, don haka silicon carbide yumbu ne mai kyau tsarin abu, a halin yanzu a cikin hadedde kewaye masana'antu na kayan aiki masu mahimmanci don samun nau'o'in aikace-aikace, irin su na'urar lithography tare da tebur na aiki na silicon carbide, dogo na jagora, mai haskakawa, yumbu chuck, da yumbu mai ƙarewa.
Fountyl na iya saduwa da na'urar daukar hoto a matsayin wakilin kayan aikin masana'anta da aka haɗa tare da babban girman, bangon bakin ciki mara ƙarfi, ƙayyadaddun tsari, fasahar shirye-shiryen kayan aikin silicon carbide daidai, kamar: silicon carbide vacuum chuck, jagorar dogo, mai nuni, tebur aiki. da jerin madaidaicin sassa na siliki carbide don injin hoto.
| Kayayyaki | Fountyl | ||
| Yawan yawa (g/cm3) | 2.98-3.02 | ||
| Matasa Modulus (GPa) | 368 | ||
| Ƙarfin sassauƙa (MPa) | 334 | ||
| Weibull | 8.35 | ||
| CTE (×10-6/℃) | 100 ℃ | 2.8×10-6 | |
| 400 ℃ | 3.6×10-6 | ||
| 800 ℃ | 4.2×10-6 | ||
| 1000 ℃ | 4.6×10-6 | ||
| Ƙarfafa Ƙarfafawa (W/m·k) (20ºC) | 160-180 | ||
| Rabon Poisson | 0.187 | ||
| Yanayin Shear (GPa) | 155 | ||