Square beam & kalozera njanji ya ultra-precision motion nsanja ndi zida zozindikirira

Kutengera mtundu wa vacuum chuck monga chitsanzo, zida zomwe zidagwiritsidwa ntchito kale kwambiri 2 inchi ndi 4 inch wafer ndi aluminiyamu yapandege, koma idakumana ndi vuto la kutsika kwambiri (koposa 1 micron) munthawi yakukula kwakukulu. zopyapyala (8 "ndipo kuposa 8"), zomwe sizingafanane ndi index yolimba kwambiri komanso zimachotsedwa. Kenako, zinthu za aluminiyamu monga kusintha, modulus yake zotanuka, kulemera kwake, matenthedwe matenthedwe ndi kukulitsa koyenelera ndi silicon carbide dwarf, koma osati zochititsa manyazi; Pambuyo pa luso lokonzekera zitsulo zazikuluzikulu komanso zovuta zooneka ngati dzenje zapadera za silicon carbide ceramics, zigawo zina kuphatikizapo ultra-precision workpiece base, ultra-precision air float guide, ndi mkono wopatsirana wa wafer zasinthidwa.

Osati kokha zigawo za silicon carbide ceramic zomwe tazitchula pamwambapa zomwe zimakwaniritsa zizindikiro zolimba kwambiri pa kusalala, kufanana, ndi verticality, pazitsulo zoyera kwambiri za silicon carbide ceramic zomwe zimafunikila kuti ziwonongeke, doping, etching process mu semiconductor industry. , makamaka mu ukadaulo wapamwamba wa CVDSiC wokonzekera zinthu, ali ndi ukadaulo wokhwima, ndipo wazindikira kupanga boti la silicon carbide ceramic crystal boat, silicon carbide ceramic kubala mbale, silicon carbide ceramic air floating movement platform, silicon carbide Ultra - nsanja yolondola yosuntha, njanji ya silicon carbide guide, silicon carbide slide slide njanji.

M'tsogolomu, tidzakulitsa kugwiritsa ntchito zida za silicon carbide m'makampani opangira zida zopangira zida zamagetsi ndikuthandizira kukweza makampani a semiconductor ndi mafakitale a silicon carbide ceramic. China mwatsatanetsatane silikoni carbide ceramic zigawo zodziimira pawokha kafukufuku ndi kukwezeleza ntchito zoweta wangoyamba kumene, ndi chitukuko champhamvu cha makampani semiconductor, kufunika msika kwa mtundu uwu wa mapangidwe mkulu-mapeto ceramic adzakhala mochulukirachulukira, silicon carbide ndi thupi lake labwino kwambiri ndi katundu wamankhwala, mumakampani a semiconductor ali ndi chiyembekezo chogwiritsa ntchito.