ʻO ka pahu pahu pahu a me ke ala alakaʻi no ka paepae neʻe ultra-precision a me nā lako ʻike

ʻO ka lawe ʻana i ka hui ʻana o ka vacuum chuck ma ke ʻano he laʻana, ʻo ka mea i hoʻohana ʻia i ka wā mua 2 iniha a me 4 ʻīniha wafer wā he alumini mokulele, akā ua hālāwai ʻo ia me ka bottleneck o ultra-high flatness (ʻoi aku ka maikaʻi ma mua o 1 micron) i ke au o ka nui-nui. nā wafers (8 "a ʻoi aku ma mua o 8"), ʻaʻole hiki ke hoʻokō i ka papa kuhikuhi paʻakikī o ka palahalaha ultra-kiʻekiʻe a hoʻopau ʻia. A laila, alumina mea e like me ka hoʻololi, kona elastic modulus, māmā kaumaha, thermal conductivity a me ka hoʻonui coefficient a me silicon carbide dwarf, akā, ʻaʻole ma kekahi mea hilahila; Ma hope o ka holomua ʻana o ka ʻenehana hoʻomākaukau ʻana o ka nui-nui a me ka paʻakikī o ka hollow hollow structure silicon carbide ceramics, nā ʻāpana me ka ultra-precision workpiece base, ultra-precision air float guide, a me ka wafer transmission arm ua hoʻonui ʻia.

ʻAʻole wale nā ​​ʻāpana silicon carbide i ʻōlelo ʻia ma luna nei e kū ana i nā hōʻailona paʻa kiʻekiʻe kiʻekiʻe e pili ana i ka pālahalaha, parallelism, a me ka verticality, no nā ʻāpana seramika silicon carbide kiʻekiʻe e pono ai no ka wafer diffusion, doping, etching kaʻina i ka ʻoihana semiconductor. , oi loa aku i loko o ka kiʻekiʻe-maʻemaʻe CVDSiC mea hoʻomākaukau 'enehana, he oo kaʻina 'enehana, a ua ike i ka hana o kiʻekiʻe-maʻemaʻe kiʻekiʻe kiʻekiʻe carbide ceramic kristal waapa, kilikaka carbide ceramic hali pā, silika carbide ceramic ea lana ana neʻe anuu, silika carbide ultra. -Pūnū hoʻoneʻe pololei, kaʻa alakaʻi silika carbide, nā mea hoʻoheheʻe kilika carbide.

I ka wā e hiki mai ana, e hoʻonui mākou i ka hoʻohana ʻana i nā mea hana silicon carbide i ka ʻoihana semiconductor a kōkua i ka hoʻomaikaʻi ʻana i ke kaulahao ʻoihana semiconductor a me ka ʻoihana silicon carbide ceramic. Ua hoʻomaka ka noiʻi kūʻokoʻa a me ka hoʻolaha noi home o Kina, me ka hoʻomohala ikaika ʻana o ka ʻoihana semiconductor, e ʻoi aku ka nui o ka mākeke no kēia ʻano o ka hale kiʻekiʻe kiʻekiʻe, silicon carbide me kona kino maikaʻi loa. nā waiwai kemika, i loko o ka ʻoihana semiconductor loaʻa nā manaʻo noiʻi ākea.